Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9637821 | Method for supplying vaporized precursor | Damien Slevin, Brad Laird, Curtis Bailey, Ming Li, Sirish Reddy +2 more | 2017-05-02 |
| 8628618 | Precursor vapor generation and delivery system with filters and filter monitoring system | Damien Slevin, Brad Laird, Curtis Bailey, Ming Li, Sirish Reddy +2 more | 2014-01-14 |
| 8178059 | Systems and methods for supplying chlorine to and recovering chlorine from a polysilicon plant | — | 2012-05-15 |