Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8187483 | Method to minimize CD etch bias | Sunil Srinivasan, David Johnson, Russell Westerman | 2012-05-29 |
| 7867403 | Temperature control method for photolithographic substrate | Larry Ryan, John Nolan, David Johnson, Russell Westerman | 2011-01-11 |
| 7749400 | Method for etching photolithographic substrates | — | 2010-07-06 |
| 7625824 | Process change detection through the use of evolutionary algorithms | — | 2009-12-01 |
| 7008877 | Etching of chromium layers on photomasks utilizing high density plasma and low frequency RF bias | Christopher Constantine, Russell Westerman, David Johnson | 2006-03-07 |