Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7558045 | Electrostatic chuck assembly with capacitive sense feature, and related operating method | Michael D. Kilgore, Jimmy Lam, Timothy Kueper, Dan Ye | 2009-07-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7558045 | Electrostatic chuck assembly with capacitive sense feature, and related operating method | Michael D. Kilgore, Jimmy Lam, Timothy Kueper, Dan Ye | 2009-07-07 |