| 11480352 |
Device for measuring clogging of filter in air conditioner and air conditioner |
Toshiro Kisakibaru, Akira Yamazaki |
2022-10-25 |
| 6777355 |
Manufacturing apparatus and manufacturing method for semiconductor device |
Toshiro Kisakibaru, Yasushi Kato, Toshikazu Suzuki, Hirohisa Koriyama, Hayato Iwamoto +1 more |
2004-08-17 |
| 6670290 |
Manufacturing apparatus and manufacturing method for semiconductor device |
Toshiro Kisakibaru, Yasushi Kato, Toshikazu Suzuki, Hirohisa Koriyama, Hayato Iwamoto +1 more |
2003-12-30 |
| 6255220 |
Method and apparatus for plasma control |
Toshiro Kisakibaru, Akira Kojima, Yasushi Kato, Satoshi Bannai, Tomohiro Chiba +1 more |
2001-07-03 |
| 5945008 |
Method and apparatus for plasma control |
Toshiro Kisakibaru, Akira Kojima, Yasushi Kato, Satoshi Bannai, Tomohiro Chiba +1 more |
1999-08-31 |
| 5431769 |
Method and system for plasma treatment |
Toshiro Kisakibaru, Akira Kojima, Takayuki Fukunaga, Yoshinori Hata, Yasushi Kato +2 more |
1995-07-11 |