Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7089947 | Apparatus and method for cleaning a semiconductor wafer | Byoung-Moon Yoon, Kyung-Hyun Kim, Sang-rok Hah, Jeong-Lim Nam, Hyun Ho Jo | 2006-08-15 |
| 7017597 | Megasonic cleaning apparatus for fabricating semiconductor device | Byoung-Moon Yoon, Sang-rok Hah, Kyung-Hyun Kim, Hyun Ho Jo, Jeong-Lim Nam | 2006-03-28 |
| 6843257 | Wafer cleaning system | Kyung-Hyun Kim, Jeong-Lim Nam, Byoung-Moon Yoon, Hyun Ho Cho, Sang-rok Hah | 2005-01-18 |
| 6651285 | Wafer cleaning apparatus | — | 2003-11-25 |
| 6562727 | Methods and compositions for removal of anti-reflective layers using fluorine containing compounds, oxidants, and water | Byoung-Moon Yoon | 2003-05-13 |
| 6550973 | Sealing assembly for bearing | — | 2003-04-22 |
| 6543079 | Wafer cleaning apparatus | — | 2003-04-08 |