Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12290778 | Scrubber, ALD process system including the scrubber and method for fabricating semiconductor device using the scrubber | Seo Young Maeng, Su Ji GIM, Jin Hong Kim, Young Seok Roh, Jong Yong Bae +1 more | 2025-05-06 |
| 11098406 | Substrate support unit and deposition apparatus including the same | Ji Ho Uh, Je Hak Lee, Jun-Sung Lee, Ji Woon Im | 2021-08-24 |