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Satellite orientation system |
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Electronic self calibration design for disk resonator gyroscopes using electrode time multiplexing |
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| 9605964 |
Gyro quadrature stabalization with demodulation phase error nulling |
Anthony Dorian Challoner |
2017-03-28 |
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Method for determining leak rate through a bond line of a MEMS device |
Henry C. Abbink, Gabriel M. Kuhn, Daryl K. Sakaida |
2013-11-12 |
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Environmentally robust disc resonator gyroscope |
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Isolated active temperature regulator for vacuum packaging of a disc resonator gyroscope |
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2012-12-11 |
| 8322028 |
Method of producing an isolator for a microelectromechanical system (MEMS) die |
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2012-12-04 |
| 8158448 |
Resonator and methods of making resonators |
— |
2012-04-17 |
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Method for optimizing direct wafer bond line width for reduction of parasitic capacitance in MEMS accelerometers |
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