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— |
1993-10-26 |
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Semiconductor device and production method thereof |
— |
1991-05-21 |
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Method of manufacturing a semiconductor integrated circuit device |
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1987-05-05 |
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— |
1986-10-14 |
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Method of forming bifets by forming isolation regions connected by diffusion in semiconductor substrate and epitaxial layer |
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1985-07-16 |