Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6628402 | Phase interference detecting method and system in interferometer, and light detector therefor | Tuneo Yamaba | 2003-09-30 |
| 6353473 | Wafer thickness measuring apparatus and detection method thereof | Hiroshi Nakajima | 2002-03-05 |
| 6295131 | Interference detecting system for use in interferometer | Tuneo Yamaba, Kenji Aikou, Shigeru Serikawa | 2001-09-25 |