Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9384939 | Electron beam writing apparatus and output control method | Kennosuke Itagaki, Takiji Ishimura | 2016-07-05 |
| 6751514 | Service method, service system and manufacturing/inspection apparatus | — | 2004-06-15 |
| 5285075 | Electron beam lithography method | Yoshinori Minamide, Genya Matsuoka | 1994-02-08 |
| 5209813 | Lithographic apparatus and method | Yoshitada Oshida, Genya Matsuoka, Teruo Iwasaki, Toshio Kaneko, Hiroyuki Takahashi +2 more | 1993-05-11 |
| 5166529 | Electron beam lithography system | Genya Matsuoka, Hiroyuki Takahashi, Hidenori Yamaguchi, Teruo Iwasaki | 1992-11-24 |