Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6604012 | Lots dispatching method for variably arranging processing equipment and/or processing conditions in a succeeding process according to the results of a preceding process and apparatus for the same | Dae Cho, Hee-Sun Chae, Seok-Hyun Kim, Seung-hoon Tong, Tae-Yang Yoon +3 more | 2003-08-05 |
| 5983704 | Method of measuring and analyzing contamination particles generated during the manufacture of semiconductor devices | Sang-Oh Park, Jin-Sung Kim, Sang-young Moon | 1999-11-16 |
| 5880355 | Apparatus for measuring contamination particles during the manufacture of semiconductor devices | Sang-Oh Park, Jin-Sung Kim, Sang-young Moon | 1999-03-09 |