Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10838366 | Bidirectional MEMS driving arrangements with a force absorbing system | Wolfgang Burkhardt, Michail Subarew, Helmut Zachmann | 2020-11-17 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10838366 | Bidirectional MEMS driving arrangements with a force absorbing system | Wolfgang Burkhardt, Michail Subarew, Helmut Zachmann | 2020-11-17 |