Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10838366 | Bidirectional MEMS driving arrangements with a force absorbing system | Wolfgang Burkhardt, Heiko Hellriegel, Helmut Zachmann | 2020-11-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10838366 | Bidirectional MEMS driving arrangements with a force absorbing system | Wolfgang Burkhardt, Heiko Hellriegel, Helmut Zachmann | 2020-11-17 |