Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9218997 | Electrostatic chuck having reduced arcing | Seok Yul Jun, Bum Jin Park, Sun-il Kim, Hyong Seok Oh, Sung-Chul Cho +5 more | 2015-12-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9218997 | Electrostatic chuck having reduced arcing | Seok Yul Jun, Bum Jin Park, Sun-il Kim, Hyong Seok Oh, Sung-Chul Cho +5 more | 2015-12-22 |