Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8795479 | Wafer clamp assembly for holding a wafer during a deposition process | Reinhard Hanzlik, Stefan Fries, Frank Mueller, Heinrich Wachinger | 2014-08-05 |
| 6682635 | Cathodic sputtering chamber for applying material to the surface of a semiconductor wafer located therein | Reinhard Hanzlik, Frank Mueller, Stefan Fries, Helmut Endl | 2004-01-27 |