Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6341006 | Projection exposure apparatus | Masayuki Murayama | 2002-01-22 |
| 5207505 | Illumination light source device | Tsuyoshi Naraki, Takashi Mori, Jun Nagatsuka | 1993-05-04 |
| 4939630 | Illumination optical apparatus | Tetsuo Kikuchi, Masahiro Nakagawa, Koichi Matsumoto, Hiroshi Shirasu, Yuji Kudoh | 1990-07-03 |
| 4737920 | Method and apparatus for correcting rotational errors during inspection of reticles and masks | — | 1988-04-12 |