Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4964726 | Apparatus and method for optical dimension measurement using interference of scattered electromagnetic energy | Karl H. Knop | 1990-10-23 |
| 4708436 | Optical imager with diffractive lenticular array | — | 1987-11-24 |
| 4668080 | Method and apparatus for forming large area high resolution patterns | Michael T. Gale, Karl H. Knop | 1987-05-26 |
| 4579454 | Optical profilometer for steep surface contours with significant surface tilt | — | 1986-04-01 |
| 4456879 | Method and apparatus for determining the doping profile in epitaxial layers of semiconductors | — | 1984-06-26 |
| 4422763 | Automatic photomask alignment system for projection printing | — | 1983-12-27 |
| 4408884 | Optical measurements of fine line parameters in integrated circuit processes | William E. Ham, Heinrich Meier | 1983-10-11 |
| 4330213 | Optical line width measuring apparatus and method | Heinrich Meier | 1982-05-18 |
| 4303341 | Optically testing the lateral dimensions of a pattern | Wolfram A. Bosenberg | 1981-12-01 |
| 4211489 | Photomask alignment system | Wolfram A. Bosenberg | 1980-07-08 |
| 4211488 | Optical testing of a semiconductor | — | 1980-07-08 |
| 4200396 | Optically testing the lateral dimensions of a pattern | Wolfram A. Bosenberg | 1980-04-29 |
| 4188123 | Optically measuring the carrier concentration in a semiconductor | — | 1980-02-12 |