Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9925639 | Cleaning of chamber components with solid carbon dioxide particles | Song-Moon Suh, Yuanhong Guo, Pulkit Agarwal | 2018-03-27 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9925639 | Cleaning of chamber components with solid carbon dioxide particles | Song-Moon Suh, Yuanhong Guo, Pulkit Agarwal | 2018-03-27 |