Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9653320 | Methods for etching a hardmask layer for an interconnection structure for semiconductor applications | Sumit Agarwal, Chiu-pien KUO, Shang-Ting Hsieh | 2017-05-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9653320 | Methods for etching a hardmask layer for an interconnection structure for semiconductor applications | Sumit Agarwal, Chiu-pien KUO, Shang-Ting Hsieh | 2017-05-16 |