Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12283502 | Substrate transfer device and substrate transfer method | Young Wook Kim, Sang Min Kim, Ji Hun Kim, Chul-Jun Park, Yong-Jun Ahn +4 more | 2025-04-22 |
| 11733077 | Carrier for measurement and wafer transfer system including the same | Sanga Bang, Geunhyung Kim, Sangmin Kim, Chul-Jun Park, Yong-Jun Ahn +4 more | 2023-08-22 |
| 10964570 | Semiconductor wafer storage system and method of supplying fluid for semiconductor wafer storage | Sangkyung Lee, Yong-Jun Ahn, Taijo JEON, Kyubum Cho, Jongsam Kim +2 more | 2021-03-30 |
| 10665483 | Apparatus for treating a substrate | Bokyung JUNG, Leekwon Gil, JungWoo Seo, Dongseok Baek, Nam Hoon Lee +1 more | 2020-05-26 |
| 10269594 | Transparent plate and substrate processing system therewith | Nam Hoon Lee, JungWoo Seo, Joonghan Shin, Byung Joo Oh, Jeongmin Lee +1 more | 2019-04-23 |