Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11764064 | Monitoring device, monitoring method and method of manufacturing semiconductor device using reflectivity of wafer | Nam Hoon Lee, Ill Hyun Park, Tae Hee Han, Jin Won Ma, Bong Ju Lee +4 more | 2023-09-19 |
| 11158510 | Monitoring device, monitoring method and method of manufacturing semiconductor device using reflectivity of wafer | Nam Hoon Lee, Ill Hyun Park, Tae Hee Han, Jin Won Ma, Bong Ju Lee +4 more | 2021-10-26 |
| 10269594 | Transparent plate and substrate processing system therewith | Nam Hoon Lee, JungWoo Seo, Joonghan Shin, Jeongmin Lee, Gi-Nam Park +1 more | 2019-04-23 |