Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6127658 | Wafer heating apparatus and method with radiation absorptive peripheral barrier blocking stray radiation | — | 2000-10-03 |
| 6084213 | Method and apparatus for increasing temperature uniformity of heated wafers | Igor Fidelman, Arie Harnik | 2000-07-04 |