| 9022699 |
Method and system for locally controlling support of a flat object |
Hilel Richman, Oded Yehoshua Licht, Oded Hamburger, Yuval Yassour, Boaz Nishri +2 more |
2015-05-05 |
| 8690489 |
Method and system for locally controlling support of a flat object |
Hilel Richman, Oded Yehoshua Licht, Oded Hamburger, Yuval Yassour, Boaz Nishri +2 more |
2014-04-08 |
| 7604439 |
Non-contact support platforms for distance adjustment |
Yuval Yassour, Hilel Richman |
2009-10-20 |
| 7603028 |
Non-contact thermal platforms |
Yuval Yassour, Hilel Richman |
2009-10-13 |
| 6362096 |
Wafer processing with water vapor pumping |
Michael E. Sandler, Itai Bransky |
2002-03-26 |
| 6313443 |
Apparatus for processing material at controlled temperatures |
Elie Schwarzfuchs, Eliezer Iskevitch |
2001-11-06 |
| 6084213 |
Method and apparatus for increasing temperature uniformity of heated wafers |
Gil Kohav, Igor Fidelman |
2000-07-04 |