GR

Geumjoo Ra

AT Axcelis Technologies: 1 patents #165 of 300Top 60%
Overall (All Time): #3,321,402 of 4,157,543Top 80%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
7511287 Systems and methods that mitigate contamination and modify surface characteristics during ion implantation processes through the introduction of gases Ronald N. Reece, Serguei Kondratenko, Louis P. Wainwright, Gary N. Cai 2009-03-31