| 10818530 |
Substrate carriers with isolation membrane |
Fachri Atamny, Yves Fenner |
2020-10-27 |
| 10734268 |
Modularity of Tec-Cell, FOUP and substrate containers and carriers |
Fachri Atamny, Yves Fenner |
2020-08-04 |
| 10720353 |
Opener apparatus |
Thomas Schober, Bernd Rahrbach, Christian Wohanka, Yves Fenner, John Fiddes |
2020-07-21 |
| 10643876 |
Substrate carrier and substrate carrier stack |
Thomas Schober, Bernd Rahrbach, Christian Wohanka, Yves Fenner, John Fiddes |
2020-05-05 |
| 10573545 |
Substrate carrier and substrate carrier stack |
Thomas Schober, Bernd Rahrbach, Christian Wohanka, Yves Fenner, John Fiddes |
2020-02-25 |
| 10515835 |
High density Tec-Cell carrier |
Yves Fenner, John Fiddes, Christian Wohanka, Bernd Rahrbach |
2019-12-24 |
| 10504764 |
Substrate stocker and systems management software |
Yves Fenner, John Fiddes, Christian Wohanka, Bernd Rahrbach |
2019-12-10 |
| 10497596 |
Overhead manufacturing, processing and storage system |
Yves Fenner, John Fiddes, Christian Wohanka, Bernd Rahrbach |
2019-12-03 |
| 10403526 |
Substrate storage and processing |
Thomas Schober, Bernd Rahrbach, Christian Wohanka, Yves Fenner |
2019-09-03 |
| 10395960 |
High density stocker with interlocking nubs |
Yves Fenner, John Fiddes, Christian Wohanka, Bernd Rahrbach |
2019-08-27 |
| 9214589 |
Method of inline manufacturing a solar cell panel |
Stephan Voser, Oliver Rattunde, Martin Dubs, Gerald Feistritzer, Volker Wuestenhagen |
2015-12-15 |
| 8870513 |
Vacuum treatment apparatus |
Stephan Voser |
2014-10-28 |