Issued Patents All Time
Showing 25 most recent of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6909510 | Application of the phase shifting diffraction interferometer for measuring convex mirrors and negative lenses | Eugene W. Campbell | 2005-06-21 |
| 6876456 | Absolute calibration of optical flats | — | 2005-04-05 |
| 6704112 | Application of the phase shifting diffraction interferometer for measuring convex mirrors and negative lenses | Eugene W. Campbell | 2004-03-09 |
| 6177993 | Inspection of lithographic mask blanks for defects | — | 2001-01-23 |
| 6014264 | Embedded fiducials in optical surfaces | — | 2000-01-11 |
| 5969848 | Micromachined electrostatic vertical actuator | Abraham P. Lee, Charles F. McConaghy, Peter Krulevitch | 1999-10-19 |
| 5933236 | Phase shifting interferometer | — | 1999-08-03 |
| 5586133 | Apparatus for increasing the frequency difference and stability of orthogonally polarized beams from a Zeeman split laser | — | 1996-12-17 |
| 5548403 | Phase shifting diffraction interferometer | — | 1996-08-20 |
| 5218424 | Flying height and topography measuring interferometer | — | 1993-06-08 |
| 5133599 | High accuracy linear displacement interferometer with probe | — | 1992-07-28 |
| 5028137 | Angular displacement measuring interferometer | Earl William Ebert | 1991-07-02 |
| 5022061 | An image focusing means by using an opaque object to diffract x-rays | H. Joseph Weaver | 1991-06-04 |
| 4963022 | Method and apparatus for generating a straight reference line | — | 1990-10-16 |
| 4950078 | High accuracy differential plane mirror interferometer | — | 1990-08-21 |
| 4881815 | Linear and angular displacement measuring interferometer | — | 1989-11-21 |
| 4859066 | Linear and angular displacement measuring interferometer | — | 1989-08-22 |
| 4807997 | Angular displacement measuring interferometer | — | 1989-02-28 |
| 4802765 | Differential plane mirror having beamsplitter/beam folder assembly | Peter S. Young | 1989-02-07 |
| 4802764 | Differential plane mirror interferometer having beamsplitter/beam folder assembly | Peter S. Young | 1989-02-07 |
| 4787747 | Straightness of travel interferometer | Peter S. Young | 1988-11-29 |
| 4752133 | Differential plane mirror interferometer | — | 1988-06-21 |
| 4746216 | Angle measuring interferometer | — | 1988-05-24 |
| 4733967 | Apparatus for the measurement of the refractive index of a gas | — | 1988-03-29 |
| 4717250 | Angle measuring interferometer | — | 1988-01-05 |