Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10114282 | Sampling for OPC building | — | 2018-10-30 |
| 9690187 | Sampling for OPC model building | — | 2017-06-27 |
| 9646220 | Methods and media for averaging contours of wafer feature edges | — | 2017-05-09 |
| 8332783 | Control of critical dimensions in optical imaging processes for semiconductor production by extracting imaging imperfections on the basis of imaging tool specific intensity measurements and simulations | Rolf Seltmann, Stefan Roling | 2012-12-11 |