Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11022565 | Process monitoring | Dror Shemesh, Adi Boehm, Gurjeet Singh | 2021-06-01 |
| 7994476 | Apparatus and method for enhancing voltage contrast of a wafer | — | 2011-08-09 |
| 7902849 | Apparatus and method for test structure inspection | — | 2011-03-08 |
| 7528614 | Apparatus and method for voltage contrast analysis of a wafer using a tilted pre-charging beam | — | 2009-05-05 |
| 7183546 | System and method for voltage contrast analysis of a wafer | — | 2007-02-27 |