Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11772136 | System and method for particle abatement in a wafer processing tool | — | 2023-10-03 |
| 11335581 | System and method for adhering a semiconductive wafer to an electrostatic carrier by adjusting relative permittivity | — | 2022-05-17 |
| D926716 | Antenna pattern for a semiconductive substrate carrier | — | 2021-08-03 |
| D913256 | Antenna pattern for a semiconductive substrate carrier | — | 2021-03-16 |
| 10607875 | Automated electrostatic bonding/de-bonding apparatus | — | 2020-03-31 |
| 10236202 | System and method for adhering a semiconductive wafer to a mobile electrostatic carrier through a vacuum | — | 2019-03-19 |
| 9984913 | Tri-modal carrier for a semiconductive wafer | — | 2018-05-29 |
| 9966294 | Mobile electrostatic carrier for a semiconductive wafer and a method of using thereof for singulation of the semiconductive wafer | — | 2018-05-08 |
| 9754809 | Tri-modal carrier for a semiconductive wafer | — | 2017-09-05 |
| 9246415 | Electrostatic carrier tray | — | 2016-01-26 |
| D689835 | Electrostatic carrier tray | — | 2013-09-17 |
| 6593040 | Method and apparatus for repairing a photomask | — | 2003-07-15 |
| 6322935 | Method and apparatus for repairing an alternating phase shift mask | — | 2001-11-27 |