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Kazuto Yamauchi, Tatsutoshi Suzuki, Daisuke Suzuki |
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| 10199242 |
Planarizing processing method and planarizing processing device |
Kazuto Yamauchi, Tatsutoshi Suzuki, Daisuke Suzuki |
2019-02-05 |
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Substrate polishing apparatus |
Tatsutoshi Suzuki, Daisuke Suzuki |
2015-07-14 |
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Polishing pad auxiliary plate and polishing device equipped with polishing pad auxiliary plate |
Tatsutoshi Suzuki |
2015-03-31 |
| 8702474 |
Method of regenerating a polishing pad using a polishing pad sub plate |
Tatsutoshi Suzuki |
2014-04-22 |
| 8702477 |
Polishing pad sub plate |
Tatsutoshi Suzuki |
2014-04-22 |
| 7923119 |
Multilayer film for top-seal |
Akinori Takeda |
2011-04-12 |
| 7896696 |
Divided connector for regulating a terminal |
Tsuyoshi Hamai, Tomihiko Nagayoshi |
2011-03-01 |