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Planarization processing device |
Eisuke Suzuki, Daisuke Suzuki |
2020-09-08 |
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Planarizing processing method and planarizing processing device |
Eisuke Suzuki, Kazuto Yamauchi, Daisuke Suzuki |
2020-05-26 |
| 10199242 |
Planarizing processing method and planarizing processing device |
Eisuke Suzuki, Kazuto Yamauchi, Daisuke Suzuki |
2019-02-05 |
| 9082715 |
Substrate polishing apparatus |
Eisuke Suzuki, Daisuke Suzuki |
2015-07-14 |
| 8992288 |
Polishing pad auxiliary plate and polishing device equipped with polishing pad auxiliary plate |
Eisuke Suzuki |
2015-03-31 |
| 8702474 |
Method of regenerating a polishing pad using a polishing pad sub plate |
Eisuke Suzuki |
2014-04-22 |
| 8702477 |
Polishing pad sub plate |
Eisuke Suzuki |
2014-04-22 |
| 7867066 |
Polishing pad |
— |
2011-01-11 |
| 7516536 |
Method of producing polishing pad |
— |
2009-04-14 |
| 7140088 |
Turning tool for grooving polishing pad, apparatus and method of producing polishing pad using the tool, and polishing pad produced by using the tool |
— |
2006-11-28 |
| 7121938 |
Polishing pad and method of fabricating semiconductor substrate using the pad |
— |
2006-10-17 |
| 7104868 |
Turning tool for grooving polishing pad, apparatus and method of producing polishing pad using the tool, and polishing pad produced by using the tool |
— |
2006-09-12 |
| 7017246 |
Turning tool for grooving polishing pad, apparatus and method of producing polishing pad using the tool, and polishing pad produced by using the tool |
— |
2006-03-28 |
| 6869343 |
Turning tool for grooving polishing pad, apparatus and method of producing polishing pad using the tool, and polishing pad produced by using the tool |
— |
2005-03-22 |