Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6915173 | Advance failure prediction | Wai T. Chan, Jill Card | 2005-07-05 |
| 6420194 | Method for extracting process determinant conditions from a plurality of process signals | — | 2002-07-16 |
| 6367329 | Acoustic time of flight and acoustic resonance methods for detecting endpoint in plasma processes | Gardy Cadet | 2002-04-09 |
| 5654903 | Method and apparatus for real time monitoring of wafer attributes in a plasma etch process | Dale E. Ibbotson, Tseng-Chung Lee | 1997-08-05 |