Issued Patents All Time
Showing 76–100 of 115 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4742286 | Gas bearing X-Y-.theta. stage assembly | — | 1988-05-03 |
| 4742376 | Step-and-repeat alignment and exposure system | — | 1988-05-03 |
| 4731964 | Steel shell building modules | — | 1988-03-22 |
| 4717263 | Gas bearing | — | 1988-01-05 |
| 4704027 | Dark field alignment and alignment mark systems | — | 1987-11-03 |
| 4687980 | X-Y addressable workpiece positioner and mask aligner using same | Karl-Heinz Johannsmeier | 1987-08-18 |
| 4677798 | Steel shell modules for prisoner detention facilities | — | 1987-07-07 |
| 4676649 | Multi-axis gas bearing stage assembly | — | 1987-06-30 |
| 4669866 | Step-and-repeat alignment and exposure system and method therefore | — | 1987-06-02 |
| 4665360 | Docking apparatus | — | 1987-05-12 |
| 4604562 | Feedback-controlled workpiece positioning system | Lawrence A. Wise | 1986-08-05 |
| 4597664 | Step-and-repeat projection alignment and exposure system with auxiliary optical unit | Karl-Heinz Johannsmeier | 1986-07-01 |
| 4585337 | Step-and-repeat alignment and exposure system | — | 1986-04-29 |
| 4577957 | Bore-sighted step-and-repeat projection alignment and exposure system | — | 1986-03-25 |
| 4577958 | Bore-sighted step-and-repeat projection alignment and exposure system | — | 1986-03-25 |
| 4573791 | Step-and-repeat projection alignment and exposure system | — | 1986-03-04 |
| 4553590 | Apparatus for pumping subterranean fluids | — | 1985-11-19 |
| 4540278 | Optical focusing system | — | 1985-09-10 |
| 4516958 | Flexible shaft coupling device | — | 1985-05-14 |
| 4510636 | System and method for forming custom-made shoe inserts | — | 1985-04-16 |
| 4496194 | Gas bearing | — | 1985-01-29 |
| 4481726 | Shoe construction | — | 1984-11-13 |
| 4473293 | Step-and-repeat projection alignment and exposure system | — | 1984-09-25 |
| 4452526 | Step-and-repeat projection alignment and exposure system with auxiliary optical unit | Karl-Heinz Johannsmeier | 1984-06-05 |
| 4451209 | Method and apparatus for pumping subterranean fluids | — | 1984-05-29 |