Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6133148 | Method of depositing film for semiconductor device in single wafer type apparatus using a lamp heating method | Seok-Jun Won, Kyoung-Hoon Kim, Young-Wook Park, Kab-jin Nam, Sun-Woo Kwak | 2000-10-17 |