Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11456154 | Plasma-generating unit and substrate treatment apparatus including the same | Seung Jin Park, Hyoseong Seong, Jung Min Won | 2022-09-27 |
| 11127573 | Support unit, apparatus and method for treating a substrate | Chang-Seung Ha, Seungbae Lee | 2021-09-21 |
| 10607818 | Support unit, apparatus and method for treating a substrate | Chang-Seung Ha, Seungbae Lee | 2020-03-31 |