Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11127573 | Support unit, apparatus and method for treating a substrate | Doo Ho Lim, Seungbae Lee | 2021-09-21 |
| 10607818 | Support unit, apparatus and method for treating a substrate | Doo Ho Lim, Seungbae Lee | 2020-03-31 |