| 10861685 |
Fluoro-based polymer composite target for sputtering |
Sang Jin Lee, Jae-heung Lee, Woo-jin CHOI, Cheol Hwan Kim, Sung Hyun Kim +4 more |
2020-12-08 |
| 7914594 |
Air filtering device and cleaning system of semiconductor manufacturing apparatus with the same |
Chang Min Cho, Joo Young Kim, Ji-Young Kim, Ju-A Ryu, Yo-Han Ahn +1 more |
2011-03-29 |
| 7846864 |
Photocatalyst materials having semiconductor characteristics and methods for manufacturing and using the same |
Son-Ki Ihm, Joo Il Park, Kwang Min Choi, Kwang Eun Jeong |
2010-12-07 |
| 7320721 |
Chemical filter and fan filter unit having the same |
Hoo-Kun Lee |
2008-01-22 |
| 7163573 |
Chemical filter medium, chemical filter including the chemical filter medium and method for manufacturing the chemical filter |
Hoo-Kun Lee |
2007-01-16 |
| 7065898 |
Module for transferring a substrate |
Hyun Joon Kim, Yo-Han Ahn, Jae Bong KIM |
2006-06-27 |
| 6874700 |
Contamination control method and apparatus, and air-conditioning system of a substrate processing facility employing the same |
Hyun Joon Kim, Hyun Ho Cho |
2005-04-05 |
| 6679194 |
Cassette table of a semiconductor fabricating apparatus |
Kun-Hyung Lee, Hyeogi-Ki Kim, Kyoung-Ho Park |
2004-01-20 |
| 6658917 |
Air-sampling carrier, apparatus and method for analyzing air in a semiconductor process tool |
Tae Ho Kim |
2003-12-09 |
