Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5975998 | Wafer processing apparatus | — | 1999-11-02 |
| 5394655 | Semiconductor polishing pad | Franklin L. Allen, William L. Smith, Thomas G. Debner | 1995-03-07 |
| 5193316 | Semiconductor wafer polishing using a hydrostatic medium | — | 1993-03-16 |