| 12269734 |
Microelectromechanical microphone with membrane trench reinforcements and method of fabrication |
Pirmin Hermann Otto Rombach, Kurt Rasmussen, Cheng-Yen Liu, Morten Ginnerup, Jan Tue Ravnkilde +1 more |
2025-04-08 |
| 12096170 |
Microphone component and method for fabricating microphone component |
Pirmin Hermann Otto Rombach |
2024-09-17 |
| 12012326 |
Microelectromechanical microphone with membrane trench reinforcements and method of fabrication |
Pirmin Hermann Otto Rombach, Kurt Rasmussen, Cheng-Yen Liu, Morten Ginnerup, Jan Tue Ravnkilde +1 more |
2024-06-18 |
| 11746001 |
Microelectromechanical microphone with membrane trench reinforcements and method of fabrication |
Pirmin Hermann Otto Rombach, Kurt Rasmussen, Cheng-Yen Liu, Morten Ginnerup, Jan Tue Ravnkilde +1 more |
2023-09-05 |
| 11736845 |
Microphone component and method for fabricating microphone component |
Pirmin Hermann Otto Rombach |
2023-08-22 |
| 11490186 |
Edge patterns of microelectromechanical systems (MEMS) microphone backplate holes |
Tsung Lin Tang, Chia-Yu Wu, Chung-Hsien Lin, Pirmin Hermann Otto Rombach |
2022-11-01 |
| 11388496 |
Microelectromechanical microphone having a stoppage member |
Pirmin Hermann Otto Rombach, Kurt Rasmussen, Cheng-Yen Liu |
2022-07-12 |
| 11128959 |
MEMS microphone with improved particle filter |
Pirmin Hermann Otto Rombach, Jan Tue Ravnkilde, Kurt Rasmussen, Morten Ginnerup |
2021-09-21 |
| 10683201 |
Resiliently mounted sensor system with damping |
Pirmin Hermann Otto Rombach, Kurt Rasmussen, Anton Leidl, Wolfgang Pahl |
2020-06-16 |
| 10419858 |
Condenser microphone with non-circular membrane |
Jan Tue Ravnkilde, Morten Ginnerup |
2019-09-17 |
| 10194251 |
Top port microphone with enlarged back volume |
Morten Ginnerup, Pirmin Hermann Otto Rombach, Jan Tue Ravnkilde, Kurt Rasmussen |
2019-01-29 |
| 9266713 |
MEMS backplate, MEMS microphone comprising a MEMS backplate and method for manufacturing a MEMS microphone |
Leif Steen Johansen, Jan Tue Ravnkilde, Pirmin Hermann Otto Rombach, Kurt Rasmussen |
2016-02-23 |
| 9197967 |
Microphone and method to position a membrane between two backplates |
— |
2015-11-24 |
| 9181087 |
Flat back plate |
Pirmin Hermann Otto Rombach |
2015-11-10 |
| 5069235 |
Apparatus for cleaning and rinsing wafers |
William L. Vetter |
1991-12-03 |
| 4997490 |
Method of cleaning and rinsing wafers |
William L. Vetter |
1991-03-05 |
