Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12288709 | Vacuum processing apparatus and vacuum processing method using the same | Kyung-Hoon Chung, Masao Nishiguchi, Ki Jun ROH, Man Soo Jang | 2025-04-29 |
| 9947508 | Lithography apparatus, and method of manufacturing an article | Nobushige Korenaga | 2018-04-17 |
| 9310688 | Processing apparatus and article manufacturing method using same | Nobushige Korenaga | 2016-04-12 |