DA

David R. Arnett

Lam Research: 2 patents #1,015 of 2,128Top 50%
Overall (All Time): #2,266,605 of 4,157,543Top 55%
2
Patents All Time

Issued Patents All Time

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
5849641 Methods and apparatus for etching a conductive layer to improve yield Jeffrey V. Musser 1998-12-15
5356478 Plasma cleaning method for removing residues in a plasma treatment chamber Ching-Hwa Chen, David R. Liu 1994-10-18