Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6115232 | Method for forming an ion implanted electrostatic chuck | Patrick J. Kelleher | 2000-09-05 |
| 6096625 | Method for improved gate oxide integrity on bulk silicon | David W. Daniel, Theodore Moore | 2000-08-01 |
| 5576224 | Method for manufacturing a monitor element | James P. Yakura, Richard K. Cole, Matthew Von Thun, Derryl D. J. Allman | 1996-11-19 |
| 5466614 | Structure and method for remotely measuring process data | James P. Yakura, Richard K. Cole, Matthew Von Thun, Derryl D. J. Allman | 1995-11-14 |