| 9464992 |
Automated wafer defect inspection system and a process of performing such inspection |
Jeffrey O'Dell, Thomas Verburgt, Mark Harless |
2016-10-11 |
| 9337071 |
Automated wafer defect inspection system and a process of performing such inspection |
Jeffrey O'Dell, Thomas Verburgt, Mark Harless |
2016-05-10 |
| 8130372 |
Wafer holding mechanism |
Mark Harless, Pat Simpkins, Kevin Barr |
2012-03-06 |
| 8045788 |
Product setup sharing for multiple inspection systems |
Patrick Simpkins |
2011-10-25 |
| 7822260 |
Edge inspection |
Mark Harless, Francy Abraham |
2010-10-26 |
| 7813638 |
System for generating camera triggers |
David G. Bocek |
2010-10-12 |
| 7729528 |
Automated wafer defect inspection system and a process of performing such inspection |
Jeffrey O'Dell, Thomas Verburgt, Mark Harless |
2010-06-01 |
| 7703823 |
Wafer holding mechanism |
Mark Harless, Pat Simpkins, Kevin Barr |
2010-04-27 |
| 7589783 |
Camera and illumination matching for inspection system |
Patrick Simpkins |
2009-09-15 |
| 7340087 |
Edge inspection |
Mark Harless, Francy Abraham |
2008-03-04 |
| 7321108 |
Dynamic focusing method and apparatus |
Mark Harless, David Vaughnn, Pat Simpkins, Shaileshkumar Goyal, Gerald Brown +1 more |
2008-01-22 |
| 7196300 |
Dynamic focusing method and apparatus |
Mark Harless, David Vaughnn, Pat Simpkins, Shaileshkumar Goyal, Gerald Brown +1 more |
2007-03-27 |
| 7111095 |
Data transfer device with data frame grabber with switched fabric interface wherein data is distributed across network over virtual lane |
Mark Harless |
2006-09-19 |
| 6970287 |
Confocal 3D inspection system and process |
David Vaughn |
2005-11-29 |
| 6882415 |
Confocal 3D inspection system and process |
David Vaughn |
2005-04-19 |
| 6870609 |
Confocal 3D inspection system and process |
David Vaughnn |
2005-03-22 |
| 6826298 |
Automated wafer defect inspection system and a process of performing such inspection |
Jeffrey O'Dell, Thomas Verburgt, Mark Harless |
2004-11-30 |
| 6773935 |
Confocal 3D inspection system and process |
David Vaughnn, Alan Blair |
2004-08-10 |
| 6731383 |
Confocal 3D inspection system and process |
Alan Blair |
2004-05-04 |