Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12205815 | Gallium arsenide substrate comprising a surface oxide layer with improved surface homogeneity | Wolfram Fliegel, Christoph Klement, Max Scheffer-Czygan, André Kleinwechter, Stefan Eichler +2 more | 2025-01-21 |
| 11170989 | Gallium arsenide substrate comprising a surface oxide layer with improved surface homogeneity | Wolfram Fliegel, Christoph Klement, Max Scheffer-Czygan, André Kleinwechter, Stefan Eichler +2 more | 2021-11-09 |
| 10460924 | Process for producing a gallium arsenide substrate which includes marangoni drying | Wolfram Fliegel, Christoph Klement, Max Scheffer-Czygan, André Kleinwechter, Stefan Eichler +2 more | 2019-10-29 |