Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7810033 | Methods and systems involving text analysis | Steven A. Cordes, Debra A. Loussedes, Patrick R. Varekamp | 2010-10-05 |
| 6429667 | Electrically testable process window monitor for lithographic processing | Christopher P. Ausschnitt | 2002-08-06 |
| 6176967 | Reactive ion etch chamber wafer masking system | — | 2001-01-23 |
| 6163367 | Apparatus and method for in-situ adjustment of light transmission in a photolithography process | — | 2000-12-19 |
| 6127686 | Thin resist process by sub-threshold exposure | — | 2000-10-03 |
| 5905019 | Thin resist process by sub-threshold exposure | — | 1999-05-18 |