Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12046520 | Method for detecting temperature of thermal chamber | Gongbai Cao, Liying Liu, Dengyong Yu | 2024-07-23 |
| 11923254 | Method for detecting temperature of thermal chamber | Gongbai Cao, Liying Liu, Dengyong Yu | 2024-03-05 |
| 11562917 | Wafer positioning method and a semiconductor manufacturing apparatus | Liying Liu, Gongbai Cao | 2023-01-24 |