Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12046520 | Method for detecting temperature of thermal chamber | Liying Liu, Chihhsin Lin, Dengyong Yu | 2024-07-23 |
| 11923254 | Method for detecting temperature of thermal chamber | Liying Liu, Chihhsin Lin, Dengyong Yu | 2024-03-05 |
| 11562917 | Wafer positioning method and a semiconductor manufacturing apparatus | Liying Liu, Chihhsin Lin | 2023-01-24 |
| 9299556 | Method for preparing semiconductor substrate with insulating buried layer gettering process | Xing Wei, Zhongdang Wang, Fei Ye, Chenglu Lin, Miao Zhang +1 more | 2016-03-29 |