Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8277567 | Method of cleaning turbo pump and chamber/turbo pump clean process | Kian-Soong Poh, Jui-Ling Tang, Cheng-Chung Lim | 2012-10-02 |
| 8021492 | Method of cleaning turbo pump and chamber/turbo pump clean process | Kian-Soong Poh, Jui-Ling Tang, Cheng-Chung Lim | 2011-09-20 |
| 7931752 | Method for cleaning semiconductor equipment | Jui-Lin Tang, Chee-Thim Loh, Kok-Poh Chong | 2011-04-26 |