Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8328938 | Buffer apparatus and thin film deposition system | Cheng-Chung Lim, Zhao-Jin Sun, Chin-Khye Pang, Yu-Heng Liu | 2012-12-11 |
| 8277567 | Method of cleaning turbo pump and chamber/turbo pump clean process | Kian-Soong Poh, Chong-Tat Lee, Cheng-Chung Lim | 2012-10-02 |
| 8021492 | Method of cleaning turbo pump and chamber/turbo pump clean process | Kian-Soong Poh, Chong-Tat Lee, Cheng-Chung Lim | 2011-09-20 |