Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12381096 | Etching method and etching apparatus | Yoshiki Igarashi, Satoru KIKUSHIMA, Takayuki Suga, Jun LIN | 2025-08-05 |
| 11791175 | Etching method and etching apparatus | Yoshiki Igarashi, Satoru KIKUSHIMA, Takayuki Suga, Jun LIN | 2023-10-17 |